Electronegative plasmas diluted by rare gases

Franklin, R. N. (2003). Electronegative plasmas diluted by rare gases. Journal of Physics D: Applied Physics, 36(21) pp. 2655–2659.

DOI: https://doi.org/10.1088/0022-3727/36/21/009

Abstract

This paper considers the case where an electronegative gas is diluted by an electropositive one, as is typical in plasma processing applications, and examines the way in which the relevant parameters vary.

The impact of dilution is examined over a wide range of pressures (3 mTorr cm–300 Torr cm) and a wide range of degrees of ionization (10−6–10−2), for dilutions of 0%, 90% and 99%.

In order to be specific, the case of argon diluting chlorine is studied in detail. But comparison with experiment awaits such data, so only general conclusions can be reached.

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