The effect of including the ion flux issuing from the core of an electronegative plasma on the electron temperature versus pressure characteristic

Franklin, R. N. (2002). The effect of including the ion flux issuing from the core of an electronegative plasma on the electron temperature versus pressure characteristic. Plasma Sources Science and Technology, 11(3) pp. 279–282.

DOI: https://doi.org/10.1088/0963-0252/11/3/309

URL: http://www.iop.org/EJ/abstract/0963-0252/11/3/309/

Abstract

The constant collision frequency model for a transitional plasma, i.e. one that is between collisionless and fully collisional, is developed for the situation where there is a flux of positive ions and electrons into the plasma. This is then used to describe the outer region of an electronegative plasma and thus obtain a plasma balance equation for the whole plasma. Chlorine is chosen as an exemplar gas for which the differences are explored between this model and another that has been suggested based on the ambipolar diffusion coefficient derived by Thompson (Thomson J B 1959 Proc. Phys. Soc. 73 818). The differences appear to be experimentally measurable. Corresponding values for estimating the effect using a constant ion mean free path model are also given.