Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry

Vas̆eková, Eva (2006). Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry. PhD thesis The Open University.

DOI: https://doi.org/10.21954/ou.ro.0000fb41

Viewing alternatives

Look up in Google Scholar

Metrics

Public Attention

Altmetrics from Altmetric

Number of Citations

Citations from Dimensions
No digital document available. Request in-person access to print thesis

Item Actions

Export

About

CORE (COnnecting REpositories)