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Carter, Emma L.; Bowen, James; Piroszhenko, I.; Toricelli, G.; Ward, Michael C. L. and Anthony, Carl J.
(2008).
URL: https://www.academia.edu/9827557/Fabrication_of_a_...
Abstract
There has been recent excitement surrounding the theoretical possibility of an artificial ‘metamaterial’ which would exhibit a repulsive Casimir force but the design of such a metamaterial as well as the practical feasibility of its fabrication are not trivial. The implications of a repulsive Casimir force for the MEMS industry could be significant with potential applications including stiction prevention in sensors, contactless bearings and contactless power transmission. The repulsion would need to be present for a wide range of frequencies including those in the UV range corresponding with separations which would exhibit a sufficiently large Casimir effect. Previous work has shown split-ring resonator (SRR) arrays fabricated using lithography to give a response in the high infrared range. This work uses focussed ion beam (FIB) technology to mill away areas of gold film leaving an SRR array which according to theoretical predictions and spectroscopic ellipsometry results exhibits a response within the optical range.