Angular effects in focused ion beam milling of silicon

Sabouri, Aydin; Anthony, Carl; Prewett, Philip and Bowen, James (2013). Angular effects in focused ion beam milling of silicon. In: 39th International Conference on Micro and Nano Engineering, 16-19 Sep 2013, London, UK.

URL: http://www.mne2013.org/

Viewing alternatives

Look up in Google Scholar

Download history

Item Actions

Export

About

CORE (COnnecting REpositories)