Defect studies of ZnO films prepared by pulsed laser deposition on various substrates

Melikhova, O.; Čižek, J.; Procházka, I.; Kužel, R.; Novotny, M.; Bulíř, J.; Lančok, J.; Anwand, W.; Brauer, G.; Connolly, J.; McCarthy, E.; Krishnamurthy, S. and Mosnier, J.-P. (2013). Defect studies of ZnO films prepared by pulsed laser deposition on various substrates. Journal of Physics: Conference Series, 443, article no. 012018.

DOI: https://doi.org/10.1088/1742-6596/443/1/012018

Abstract

ZnO thin films deposited on various substrates were characterized by slow positron implantation spectroscopy (SPIS) combined with X-ray diffraction (XRD). All films studied exhibit wurtzite structure and crystallite size 20-100 nm. The mosaic spread of crystallites is relatively small for the films grown on single crystalline substrates while it is substantial for the film grown on amorphous substrate. SPIS investigations revealed that ZnO films deposited on single crystalline substrates exhibit significantly higher density of defects than the film deposited on amorphous substrate. This is most probably due to a higher density of misfit dislocations, which compensate for the lattice mismatch between the film and the substrate.

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