The status of the database for plasma processing

Mason, N. J. (2009). The status of the database for plasma processing. Journal of Physics D: Applied Physics, 42(19) p. 194003.

DOI: https://doi.org/10.1088/0022-3727/42/19/194003

Abstract

Plasma based technologies are one of the largest commercial industries in the world today. To understand the behaviour and properties of such chemically active plasma detailed quantitative information is required for the most important collisional and radiative processes taking place, both in the gas phase and on the surfaces, requiring an enormously detailed database. In this brief review I examine the current status of the current database and identify the most important data needs in future plasma research.

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