Copy the page URI to the clipboard
Antony, B.K.; Joshipura, K.N. and Mason, N.J.
(2005).
DOI: https://doi.org/10.1088/0953-4075/38/3/005
Abstract
Electron impact total cross sections (50-2000 eV) and total ionization cross sections (threshold to 2000 eV) are calculated for typical plasma etching molecules CF4, C2F4, C2F6, C3F8 and CF3I and the CFx (x = 1-3) radicals. The total elastic and inelastic cross sections are determined in the spherical complex potential formalism. The sum of the two gives the total cross section and the total inelastic cross section is used to calculate the total ionization cross sections. The present total and ionization cross sections are found to be consistent with other theories and experimental measurements, where they exist. Our total cross section results for CFx (x = 1-3) radicals presented here are first estimates on these species.
Viewing alternatives
Metrics
Public Attention
Altmetrics from AltmetricNumber of Citations
Citations from DimensionsItem Actions
Export
About
- Item ORO ID
- 18428
- Item Type
- Journal Item
- ISSN
- 0953-4075
- Academic Unit or School
-
Faculty of Science, Technology, Engineering and Mathematics (STEM) > Physical Sciences
Faculty of Science, Technology, Engineering and Mathematics (STEM) - Research Group
- Physics
- Copyright Holders
- © 2005 IOP Publishing Ltd
- Depositing User
- Colin Smith