Some replica techniques for the scanning electron microscope

Marlow, P.; Presland, A. E. B. and Wield, D. (1970). Some replica techniques for the scanning electron microscope. Micron, 2 pp. 139–147.

DOI: https://doi.org/10.1016/0047-7206(70)90004-x

Abstract

The application of some simple replica techniques to SEM is described. Three types of replicating agents were used, normal polymer (cellulose acetate), water-soluble (methyl cellulose) and water-catalysed (Tranco resin 542F). Metallic coating was necessary, and the effect of coating thickness on charging, beam damage and resolution was examined. Appropriate instrumental operating techniques are discussed.

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