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Jump to: 2011 | 2004

Number of items: 2.

2011

Verdonck, Patrick; Šamara, Vladimir; Goodyear, Alec; Ferchichi, Abdelkarim; Van Besien, Els; Baklanov, Mikhail R. and Braithwaite, Nicholas (2011). Influence of the ion bombardment of O₂ plasmas on low-k materials. Thin Solid Films, 520(1) pp. 464–468.

2004

Verdonck, Partick; Goodyear, Alec and Braithwaite, Nicholas St John (2004). The Influence of diffusion of fluorine compounds for silicon lateral etching. Thin Solid Films, 459(1-2) pp. 141–144.

This list was generated on Thu May 23 21:26:06 2013 BST.

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