Franklin, R. N.
|DOI (Digital Object Identifier) Link:||http://doi.org/10.1088/0022-3727/36/21/009|
|Google Scholar:||Look up in Google Scholar|
This paper considers the case where an electronegative gas is diluted by an electropositive one, as is typical in plasma processing applications, and examines the way in which the relevant parameters vary.
The impact of dilution is examined over a wide range of pressures (3 mTorr cm–300 Torr cm) and a wide range of degrees of ionization (10−6–10−2), for dilutions of 0%, 90% and 99%.
In order to be specific, the case of argon diluting chlorine is studied in detail. But comparison with experiment awaits such data, so only general conclusions can be reached.
|Item Type:||Journal Article|
|Academic Unit/Department:||Faculty of Science, Technology, Engineering and Mathematics (STEM) > Physical Sciences
Faculty of Science, Technology, Engineering and Mathematics (STEM)
|Depositing User:||Tracey Moore|
|Date Deposited:||12 Jun 2007|
|Last Modified:||02 Aug 2016 13:06|
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