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Electronegative plasmas - why are they so different?

Franklin, R. N. (2002). Electronegative plasmas - why are they so different? Plasma Sources Science and Technology, 11(3A) A31-A37.

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This paper seeks to summarize the work that has gone on over the past 20 years in plasmas that has become of great commercial importance but was not studied in depth previously. It points up the differences between conventional electropositive plasmas and those where negative ions dominate. It removes some of the errors and misunderstandings that have occurred and tries to bring the field into a coherent consistent whole.

Item Type: Journal Article
ISSN: 0963-0252
Academic Unit/Department: Science > Physical Sciences
Item ID: 7963
Depositing User: Tracey Moore
Date Deposited: 12 Jun 2007
Last Modified: 16 Jul 2013 12:18
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