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An electrostatic actuated micro-structure for high-cycle fatigue testing

Polido Gomes, J.; Kowal, J. and Edwards, L. (2005). An electrostatic actuated micro-structure for high-cycle fatigue testing. In: Proceedings of the 2005 SEM Annual Conference and Exposition on Experimental and Applied Mechanics, 7-9 June 2005, Portland, Oregon, USA.

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Fatigue failure knowledge of polycrystalline silicon (polysilicon) thin films is crucial for the design of efficient microelectromechanical systems (MEMS). Reliability investigations of polysilicon thin films are normally conducted by subjecting a population of micron-scale fracture mechanics specimens to cyclic loading while testing in laboratory air or cvacuum conditions. The present work describes the design of two fully-integrated micromachined fatigue-characterization specimens fabricated for high-cycle fatigue testing of 2-um thick polysilicon thin films. Preliminary results were obtained from tests conducted on a 2-um resonant structure that works at fully reversed, constant amplitude stresses at a frequency of about 46 kHz. The present work permitted the characterization of the motion of the structure and calibration of the imaging system.

Item Type: Conference Item
Extra Information: ISBN - 0-912053-90-9
Keywords: MEMS; fatigue failure; polysilicon; resonant
Academic Unit/Department: Mathematics, Computing and Technology > Engineering & Innovation
Item ID: 6975
Depositing User: Jan Kowal
Date Deposited: 07 Jun 2007
Last Modified: 02 Dec 2010 19:57
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