Extending the ALD temperature window of silver using tertiary butyl hydrazine as a co-reactant

Golrokhi, Zahra; Potter, Richard; Chalker, Paul R.; Romani, Simon and Marshal, Paul A. Extending the ALD temperature window of silver using tertiary butyl hydrazine as a co-reactant. In: The 16th International Atomic Layer Deposition Conference, Jul 2016, Dublin.

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• Item ORO ID
• 69185
• Item Type
• Conference or Workshop Item
• Academic Unit or School
• Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
  Faculty of Science, Technology, Engineering and Mathematics (STEM)
• Depositing User
• Zahra Golrokhi