Extending the ALD temperature window of silver using tertiary butyl hydrazine as a co-reactant

Golrokhi, Zahra; Potter, Richard; Chalker, Paul R.; Romani, Simon and Marshal, Paul A. Extending the ALD temperature window of silver using tertiary butyl hydrazine as a co-reactant. In: The 16th International Atomic Layer Deposition Conference, Jul 2016, Dublin.

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