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Comparative assessment of different sacrificial materials for releasing SU-8 structures

Psoma, Sotiria D. and Jenkins, Derek W.K. (2005). Comparative assessment of different sacrificial materials for releasing SU-8 structures. Reviews on Advanced Materials Science, 10(2) pp. 149–155.

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Abstract

A range of materials are tested and compared as sacrificial layers for releasing SU-8 structures from the substrate following their manufacture. Four metals (chromium, chromiun/gold, copper and aluminium) and three polymers (polymethylmethacrylate, polyimide and polystyrene) were investigated. Factors assessed included; quality of the SU-8 structures (by SEM examination before and after release), effect of changing etchant concentrations, monitoring of the undercutting process (through depth measurement with time), and the time taken for the successful release process. Overall, it was found that the metals were the best choice as sacrificial layers under SU-8 for structures up to 200 μm, whereas polymers were the better for larger structures (up to 600 μm in this work).

Item Type: Journal Item
Copyright Holders: 2005 Advanced Study Center Co. Ltd.
ISSN: 1605-8127
Keywords: SU8; sacrificial materials; microfabrication
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
Faculty of Science, Technology, Engineering and Mathematics (STEM)
Research Group: Smart Materials
Item ID: 60025
Depositing User: Sotiria Psoma
Date Deposited: 26 Mar 2019 14:47
Last Modified: 04 Apr 2019 00:00
URI: http://oro.open.ac.uk/id/eprint/60025
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