The Open UniversitySkip to content
 

Mechanical characterization of torsional micro-paddles using atomic force microscopy

Mahmoodi, Nasim; Sabouri, Aydin; Bowen, James; Anthony, Carl J and Mendes, Paula M (2018). Mechanical characterization of torsional micro-paddles using atomic force microscopy. Journal of Sensors, article no. 6160907.

Full text available as:
[img]
Preview
PDF (Version of Record) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
Download (7MB) | Preview
DOI (Digital Object Identifier) Link: https://doi.org/10.1155/2018/6160907
Google Scholar: Look up in Google Scholar

Abstract

The reference cantilever method is shown to act as a direct and simple method for determination of torsional spring constant. It has been applied to the characterization of micropaddle structures similar to those proposed for resonant functionalized chemical sensors and resonant thermal detectors. It is shown that this method can be used as an effective procedure to characterize a key parameter of these devices and would be applicable to characterization of other similar MEMS/NEMS devices such as micromirrors. In this study, two sets of micropaddles are manufactured (beams at centre and offset by 2.5 μm) by using LPCVD silicon nitride as a substrate. The patterning is made by direct milling using focused ion beam. The torsional spring constant is achieved through micromechanical analysis via atomic force microscopy. To obtain the gradient of force curve, the area of the micropaddle is scanned and the behaviour of each pixel is investigated through an automated developed code. The experimental results are in a good agreement with theoretical results.

Item Type: Journal Item
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
Faculty of Science, Technology, Engineering and Mathematics (STEM)
Research Group: Smart Materials
Item ID: 55829
Depositing User: James Bowen
Date Deposited: 26 Mar 2019 09:32
Last Modified: 25 Jun 2019 21:24
URI: http://oro.open.ac.uk/id/eprint/55829
Share this page:

Metrics

Altmetrics from Altmetric

Citations from Dimensions

Download history for this item

These details should be considered as only a guide to the number of downloads performed manually. Algorithmic methods have been applied in an attempt to remove automated downloads from the displayed statistics but no guarantee can be made as to the accuracy of the figures.

Actions (login may be required)

Policies | Disclaimer

© The Open University   contact the OU