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Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Limão-Vieira, P.; Eden, S. and Mason, N.J. (2003). Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry. Radiation Physics and Chemistry, 68(1-2) pp. 187–192.

DOI (Digital Object Identifier) Link: http://dx.doi.org/10.1016/S0969-806X(03)00278-0
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Abstract

Photo-absorption cross sections have been measured for methyl iodide, CF3I (310 nm>λ>110 nm) and dichlorodifluoromethane, CCl2F2 (225 nm>λ>110 nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF3I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

Item Type: Journal Article
ISSN: 0969-806X
Keywords: plasma etching; VUV photo-absorption; electron energy loss spectroscopy (EELS); synchrotron radiation; photolysis rates
Academic Unit/Department: Science > Physical Sciences
Interdisciplinary Research Centre: Centre for Earth, Planetary, Space and Astronomical Research (CEPSAR)
Item ID: 4616
Depositing User: Users 6827 not found.
Date Deposited: 07 Jul 2006
Last Modified: 24 Nov 2014 12:02
URI: http://oro.open.ac.uk/id/eprint/4616
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