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Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma

Marinov, D.; el Otell, Z.; Bowden, M. and Braithwaite, N. St.J. (2015). Extraction and neutralization of positive and negative ions from a pulsed electronegative inductively coupled plasma. Plasma Sources Science and Technology, 24(6), article no. 065008.

URL: http://iopscience.iop.org/article/10.1088/0963-025...
DOI (Digital Object Identifier) Link: https://doi.org/10.1088/0963-0252/24/6/065008
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Abstract

Almost electron-free (ion-ion) plasmas can be transiently formed during the afterglow phase of pulsed plasmas in electronegative gases. In ion-ion plasmas, both positive and negative ions can be extracted which makes them advantageous for a number of applications. In this paper, we investigate the extraction and acceleration of positive and negative ion beams from a pulsed inductively coupled plasma in SF6. The plasma is bounded by two electrodes biased synchronously with the discharge modulation. It is shown that when a DC bias voltage is applied during the afterglow phase, positive/negative ions are accelerated in a positive/negative space charge sheath formed in front of one of the electrodes. The energy of extracted ions closely follows the amplitude of the applied bias voltage (25–150 V) and the peak beam current density reaches 2 A m−2. With a view to using the described system as a source of energetic neutral beams for low damage material processing, simultaneous extraction and surface neutralization of positive and negative ions using an extraction electrode with high aspect ratio apertures is investigated.

Item Type: Journal Item
Copyright Holders: 2015 IOP Publishing Ltd
ISSN: 1361-6595
Project Funding Details:
Funded Project NameProject IDFunding Body
Single Nanometer ManufacturingSNMEU
Keywords: plasma etching; retarding field analyser; negative ion beams; positive ion beams
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Physical Sciences
Faculty of Science, Technology, Engineering and Mathematics (STEM)
Research Group: Physics
Item ID: 45182
Depositing User: N St.J Braithwaite
Date Deposited: 26 Jan 2016 11:00
Last Modified: 01 May 2019 13:19
URI: http://oro.open.ac.uk/id/eprint/45182
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