Effects of focused ion beam dwell time on nano fabrication

Sabouri, Aydin; Anthony, Carl; Prewett, Philip and Bowen, James (2013). Effects of focused ion beam dwell time on nano fabrication. In: 39th International Conference on Micro and Nano Engineering, 16-19 Sep 2013, London, UK.

URL: http://www.mne2013.org/

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• Item ORO ID
• 43392
• Item Type
• Conference or Workshop Item
• Project Funding Details

• Funded Project Name	Project ID	Funding Body
  Seventh Framework Programme FP7/2007-2013	Grant agreement no. 318804 (Single Nanometre Manufacturing)	EU
  Not Set	Not Set	European Regional Development Fund (ERDF)

• Academic Unit or School
• Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
  Faculty of Science, Technology, Engineering and Mathematics (STEM)
• Copyright Holders
• © 2013 The Authors
• Related URLs
• • http://www.mne2013.org/technical-program...(Other)
  • https://www.academia.edu/9823651/Effects...(Other)
• Depositing User
• James Bowen