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Angular effects in focused ion beam milling of silicon

Sabouri, Aydin; Anthony, Carl; Prewett, Philip and Bowen, James (2013). Angular effects in focused ion beam milling of silicon. In: 39th International Conference on Micro and Nano Engineering, 16-19 September 2013, London, UK.

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Item Type: Conference or Workshop Item
Project Funding Details:
Funded Project NameProject IDFunding Body
Seventh Framework Programme FP7/2007-2013Grant agreement No. 318804 (Single Nanometre Manufacturing)EU
Not SetNot SetEuropean Regional Development Fund (ERDF)
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
Faculty of Science, Technology, Engineering and Mathematics (STEM)
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Item ID: 43391
Depositing User: James Bowen
Date Deposited: 16 Jun 2015 13:54
Last Modified: 15 Nov 2016 10:12
URI: http://oro.open.ac.uk/id/eprint/43391
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