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AFM characterisation of silicon-on-insulator push-in plates for Casimir force measurements

Anthony, C. J.; Bowen, J.; Torricelli, G.; Carter, E. L.; Ward, M. C. L. and Binns, C. (2008). AFM characterisation of silicon-on-insulator push-in plates for Casimir force measurements. Micro & Nano Letters, 3(1) pp. 7–11.

DOI (Digital Object Identifier) Link: https://doi.org/10.1049/mnl:20070067
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Abstract

The use of silicon-on-insulator (SOI) material to fabricate a set of push-in plates for Casimir force measurements is reported. These plates have the advantage of being parallel as fabricated, which is an essential criterion for accurate Casimir force measurements. The roughness of the inner SOI silicon surfaces after the removal of the sacrificial buried oxide and subsequent CO2 critical point drying is characterised. The root-mean-square (RMS) surface roughness measured by atomic force microscopy (AFM) is of the order of 0.25 nm and is shown by calculation to be an insignificant contribution to the measurement of the Casimir force with these plates.

Item Type: Journal Item
Copyright Holders: 2008 The Institution of Engineering and Technology
ISSN: 1750-0443
Keywords: Casimir effect; silicon-on-insulator; atomic force microscopy; micromechanical devices; surface roughness
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Engineering and Innovation
Faculty of Science, Technology, Engineering and Mathematics (STEM)
Item ID: 43199
Depositing User: James Bowen
Date Deposited: 04 Jun 2015 09:01
Last Modified: 10 Nov 2016 17:18
URI: http://oro.open.ac.uk/id/eprint/43199
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