The Open UniversitySkip to content
 

Fluorine codoping in germanium to suppress donor diffusion and deactivation

Chroneos, A.; Grimes, R. W. and Bracht, H. (2009). Fluorine codoping in germanium to suppress donor diffusion and deactivation. Journal of Applied Physics, 106(6), article no. 063707.

Full text available as:
[img]
Preview
PDF (Version of Record) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
Download (386Kb) | Preview
URL: http://jap.aip.org/resource/1/japiau/v106/i6/p0637...
DOI (Digital Object Identifier) Link: http://doi.org/10.1063/1.3224900
Google Scholar: Look up in Google Scholar

Abstract

Electronic structure calculations are used to investigate the stability of fluorine-vacancy (Fn)Vm) clusters in germanium (Ge). Using mass action analysis, it is predicted that the FnVm clusters can remediate the concentration of free V considerably. Importantly, we find that F and P codoping leads to a reduction in the concentration of donor-vacancy (DV) pairs. These pairs are responsible for the atomic transport and the formation of DnV clusters that lead to a deactivation of donor atoms. The predictions are technologically significant as they point toward an approach by which V-mediated donor diffusion and the formation of inactive D(n)V clusters can be suppressed. This would result in shallow and fully electrically active n-type doped regions in Ge-based electronic devices.

Item Type: Journal Article
Copyright Holders: 2009 American Institute of Physics
ISSN: 1089-7550
Extra Information: This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Keywords: diffusion; electronic structure; elemental semiconductors; fluorine; germanium; phosphorus; semiconductor doping; vacancies (crystal)
Academic Unit/Department: Mathematics, Computing and Technology > Engineering & Innovation
Mathematics, Computing and Technology
Item ID: 35188
Depositing User: Alexander Chroneos
Date Deposited: 07 Nov 2012 14:32
Last Modified: 25 Feb 2016 11:04
URI: http://oro.open.ac.uk/id/eprint/35188
Share this page:

Altmetrics

Scopus Citations

Download history for this item

These details should be considered as only a guide to the number of downloads performed manually. Algorithmic methods have been applied in an attempt to remove automated downloads from the displayed statistics but no guarantee can be made as to the accuracy of the figures.

▼ Automated document suggestions from open access sources

Actions (login may be required)

Policies | Disclaimer

© The Open University   + 44 (0)870 333 4340   general-enquiries@open.ac.uk