Chroneos, A.; Grimes, R. W. and Bracht, H.
Fluorine codoping in germanium to suppress donor diffusion and deactivation.
Journal of Applied Physics, 106(6), article no. 063707.
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Electronic structure calculations are used to investigate the stability of fluorine-vacancy (Fn)Vm) clusters in germanium (Ge). Using mass action analysis, it is predicted that the FnVm clusters can remediate the concentration of free V considerably. Importantly, we find that F and P codoping leads to a reduction in the concentration of donor-vacancy (DV) pairs. These pairs are responsible for the atomic transport and the formation of DnV clusters that lead to a deactivation of donor atoms. The predictions are technologically significant as they point toward an approach by which V-mediated donor diffusion and the formation of inactive D(n)V clusters can be suppressed. This would result in shallow and fully electrically active n-type doped regions in Ge-based electronic devices.
||2009 American Institute of Physics
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||diffusion; electronic structure; elemental semiconductors; fluorine; germanium; phosphorus; semiconductor doping; vacancies (crystal)
||Mathematics, Computing and Technology > Engineering & Innovation
||07 Nov 2012 14:32
||18 May 2013 01:27
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