The Open UniversitySkip to content
 

The vacancy in silicon: a critical evaluation of experimental and theoretical results

Bracht, Hartmut and Chroneos, Alexander (2008). The vacancy in silicon: a critical evaluation of experimental and theoretical results. Journal of Applied Physics, 104(7), article no. 076108.

Full text available as:
[img]
Preview
PDF (Version of Record) - Requires a PDF viewer such as GSview, Xpdf or Adobe Acrobat Reader
Download (124Kb) | Preview
DOI (Digital Object Identifier) Link: http://dx.doi.org/10.1063/1.2996284
Google Scholar: Look up in Google Scholar

Abstract

Recent experimental studies of Shimizu [Phys. Rev. Lett. 98, 095901 (2007)] revealed an activation enthalpy of 3.6 eV for the vacancy contribution to Si self-diffusion. Although this value seems to be in accurate agreement with recent theoretical results, it is at variance with experiments on vacancy-mediated dopant diffusion in Si. In the present study we review results from electronic structure calculations and conclude that the calculations are consistent with an activation enthalpy of 4.5-4.6 eV rather than 3.6 eV for the vacancy contribution to self-diffusion. Moreover, our calculations predict activation enthalpies of 4.45 and 3.81 eV for the vacancy-mediated diffusion of phosphorus and antimony, respectively, in good agreement with the most recent experimental results. (C) 2008 American Institute of Physics

Item Type: Journal Article
Copyright Holders: 2008 American Institute of Physics
ISSN: 0021-8979
Extra Information: This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.
Academic Unit/Department: Mathematics, Computing and Technology > Engineering & Innovation
Item ID: 35171
Depositing User: Alexander Chroneos
Date Deposited: 06 Nov 2012 09:50
Last Modified: 30 Apr 2013 06:55
URI: http://oro.open.ac.uk/id/eprint/35171
Share this page:

Altmetrics

Scopus Citations

Actions (login may be required)

View Item
Report issue / request change

Policies | Disclaimer

© The Open University   + 44 (0)870 333 4340   general-enquiries@open.ac.uk