Electron interaction cross sections for CF₃I, C₂F₄, and CF_x (x=1-3) radicals

Rozum, I.; Limão-Vieira, P.; Eden, S.; Mason, N. J. and Tennyson, J. (2006). Electron interaction cross sections for CF₃I, C₂F₄, and CF_x (x=1-3) radicals. Journal of Physical and Chemical Reference Data , 35(1) pp. 267–285.

DOI (Digital Object Identifier) Link:	http://dx.doi.org/doi:10.1063/1.2149379
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Abstract

The supply of absolute electron-impact cross sections for molecular targets and radicals is extremely important for developing plasma reactors and testing different types of etching gases. Current demand for such models is high as the industry aims to replace traditional plasma processing gases with less polluting species. New theoretical electron impact cross sections at typical etching plasma energies

Item Type:	Journal Article
Copyright Holders:	2006 American Institute of Physics
ISSN:	0047-2689
Academic Unit/Department:	Science > Physical Sciences
Interdisciplinary Research Centre:	Centre for Earth, Planetary, Space and Astronomical Research (CEPSAR)
Related URLs:	http://eprints.ucl.ac.uk/1335/(Other)
Item ID:	25746
Depositing User:	Sam Eden
Date Deposited:	06 Apr 2011 10:49
Last Modified:	06 Apr 2011 10:49
URI:	http://oro.open.ac.uk/id/eprint/25746

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