The Open UniversitySkip to content
 

Electron interaction cross sections for CF3I, C2F4, and CFx (x=1-3) radicals

Rozum, I.; Limão-Vieira, P.; Eden, S.; Mason, N. J. and Tennyson, J. (2006). Electron interaction cross sections for CF3I, C2F4, and CFx (x=1-3) radicals. Journal of Physical and Chemical Reference Data , 35(1) pp. 267–285.

DOI (Digital Object Identifier) Link: http://dx.doi.org/10.1063/1.2149379
Google Scholar: Look up in Google Scholar

Abstract

The supply of absolute electron-impact cross sections for molecular targets and radicals is extremely important for developing plasma reactors and testing different types of etching gases. Current demand for such models is high as the industry aims to replace traditional plasma processing gases with less polluting species. New theoretical electron impact cross sections at typical etching plasma energies

Item Type: Journal Article
Copyright Holders: 2006 American Institute of Physics
ISSN: 0047-2689
Academic Unit/Department: Science > Physical Sciences
Interdisciplinary Research Centre: Centre for Earth, Planetary, Space and Astronomical Research (CEPSAR)
Related URLs:
Item ID: 25746
Depositing User: Sam Eden
Date Deposited: 06 Apr 2011 10:49
Last Modified: 06 Apr 2011 10:49
URI: http://oro.open.ac.uk/id/eprint/25746
Share this page:

Altmetrics

Scopus Citations

Actions (login may be required)

View Item
Report issue / request change

Policies | Disclaimer

© The Open University   + 44 (0)870 333 4340   general-enquiries@open.ac.uk