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Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Limão-Vieira, P.; Eden, S. and Mason, N. J. (2003). Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry. Radiation Physics and Chemistry, 68(1-2) pp. 187–192.

DOI (Digital Object Identifier) Link: http://dx.doi.org/10.1016/S0969-806X(03)00278-0
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Abstract

Photo-absorption cross sections have been measured for methyl iodide, CF3I (310 nm>λ>110 nm) and dichlorodifluoromethane, CCl2F2 (225 nm>λ>110 nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF3I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

Item Type: Journal Article
Copyright Holders: 2003 Elsevier Science Ltd.
ISSN: 0969-806X
Project Funding Details:
Funded Project NameProject IDFunding Body
Not SetNot SetEPSRC (Engineering and Physical Sciences Research Council)
Not SetNot SetNERC (Natural Environment Research Council)
Not SetNot SetCLRC
Keywords: plasma etching; VUV photo-absorption; electron energy loss spectroscopy (EELS); synchrotron radiation; photolysis rates
Academic Unit/Department: Science > Physical Sciences
Interdisciplinary Research Centre: Centre for Earth, Planetary, Space and Astronomical Research (CEPSAR)
Item ID: 25743
Depositing User: Sam Eden
Date Deposited: 13 Apr 2011 12:57
Last Modified: 24 Nov 2014 12:02
URI: http://oro.open.ac.uk/id/eprint/25743
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