Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Limão-Vieira, P.; Eden, S. and Mason, N. J. (2003). Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry. Radiation Physics and Chemistry, 68(1-2) pp. 187–192.

DOI: https://doi.org/10.1016/S0969-806X(03)00278-0

Abstract

Photo-absorption cross sections have been measured for methyl iodide, CF₃I (310 nm>λ>110 nm) and dichlorodifluoromethane, CCl₂F₂ (225 nm>λ>110 nm) using synchrotron radiation. Electron energy loss spectroscopy was also used to probe the electronic and vibronic excitation of CF₃I. Electronic states have been assigned to each of the observed absorption bands incorporating both valence and Rydberg transitions. The measured VUV cross sections are used to derive the photolysis rates in the terrestrial atmosphere and hence determine the potential importance of each gas in global warming and ozone depletion.

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About

• Item ORO ID
• 25743
• Item Type
• Journal Item
• ISSN
• 0969-806X
• Project Funding Details

• Funded Project Name	Project ID	Funding Body
  Not Set	Not Set	EPSRC (Engineering and Physical Sciences Research Council)
  Not Set	Not Set	NERC (Natural Environment Research Council)
  Not Set	Not Set	CLRC

• Keywords
• plasma etching; VUV photo-absorption; electron energy loss spectroscopy (EELS); synchrotron radiation; photolysis rates
• Academic Unit or School
• Faculty of Science, Technology, Engineering and Mathematics (STEM) > Physical Sciences
  Faculty of Science, Technology, Engineering and Mathematics (STEM)
• Research Group
• Physics
• Copyright Holders
• © 2003 Elsevier Science Ltd.
• Depositing User
• Sam Eden