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Physics of Radio-Frequency Plasmas

Chabert, Pascal and Braithwaite, Nicholas (2011). Physics of Radio-Frequency Plasmas. Cambridge: Cambridge University Press.

URL: http://www.cambridge.org/gb/knowledge/isbn/item570...
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Abstract

Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.

Item Type: Authored Book
Copyright Holders: 2011 P. Chabert and N. St. J. Braithwaite
ISBN: 0-521-76300-2, 978-0-521-76300-4
Academic Unit/Department: Science > Physical Sciences
Interdisciplinary Research Centre: Centre for Earth, Planetary, Space and Astronomical Research (CEPSAR)
Item ID: 24561
Depositing User: N St.J Braithwaite
Date Deposited: 09 Nov 2010 09:56
Last Modified: 24 Nov 2014 11:28
URI: http://oro.open.ac.uk/id/eprint/24561
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