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The status of the database for plasma processing

Mason, N. J. (2009). The status of the database for plasma processing. Journal of Physics D: Applied Physics, 42(19) p. 194003.

DOI (Digital Object Identifier) Link: https://doi.org/10.1088/0022-3727/42/19/194003
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Abstract

Plasma based technologies are one of the largest commercial industries in the world today. To understand the behaviour and properties of such chemically active plasma detailed quantitative information is required for the most important collisional and radiative processes taking place, both in the gas phase and on the surfaces, requiring an enormously detailed database. In this brief review I examine the current status of the current database and identify the most important data needs in future plasma research.

Item Type: Journal Item
Copyright Holders: 2009 IOP Publishing Limited
ISSN: 1361-6463
Academic Unit/School: Faculty of Science, Technology, Engineering and Mathematics (STEM) > Physical Sciences
Faculty of Science, Technology, Engineering and Mathematics (STEM)
Research Group: Physics
Item ID: 19332
Depositing User: Astrid Peterkin
Date Deposited: 23 Dec 2009 12:06
Last Modified: 07 Dec 2018 09:30
URI: http://oro.open.ac.uk/id/eprint/19332
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